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Production of films and powders for semiconductor device applications

Patent ·
OSTI ID:871432
 [1];  [2];  [2]
  1. Littleton, CO
  2. Golden, CO
+ Show Author Affiliations

A process for chemical bath deposition of selenide and sulfide salts as films and powders employable as precursors for the fabrication of solar cell devices. The films and powders include (1) Cu.sub.x Se.sub.n, wherein x=1-2 and n=1-3; (2) Cu.sub.x Ga.sub.y Se.sub.n, wherein x=1-2, y=0-1 and n=1-3; (3) Cu.sub.x In.sub.y Se.sub.n, wherein x=1-2.27, y=0.72-2 and n=1-3; (4) Cu.sub.x (InGa).sub.y Se.sub.n, wherein x=1-2.17, y=0.96-2 and n=1-3; (5) In.sub.y Se.sub.n, wherein y=1-2.3 and n=1-3; (6) Cu.sub.x S.sub.n, wherein x=1-2 and n=1-3; and (7) Cu.sub.x (InGa).sub.y (SeS).sub.n, wherein x=1-2, y=0.07-2 and n=0.663-3. A reaction vessel containing therein a substrate upon which will form one or more layers of semiconductor material is provided, and relevant solution mixtures are introduced in a sufficient quantity for a sufficient time and under favorable conditions into the vessel to react with each other to produce the resultant salt being prepared and deposited as one or more layers on the substrate and as a powder on the floor of the vessel. Hydrazine is present during all reaction processes producing non-gallium containing products and optionally present during reaction processes producing gallium-containing products to function as a strong reducing agent and thereby enhance reaction processes.

Research Organization:
Midwest Research Institute
DOE Contract Number:
AC36-83CH10093
Assignee:
Midwest Research Institute (Kansas City, MO)
Patent Number(s):
US 5731031
OSTI ID:
871432
Country of Publication:
United States
Language:
English

References (4)

The properties of chemically deposited Cu2−xSe thin films journal June 1987
Chemical bath deposition of CuxS thin films using ethylenediaminetetraacetic acid (EDTA) as complexing agent journal December 1989
Preparation and characterization of chemically deposited CuInS2 thin films journal May 1986
Solution Growth and Electrodeposited CuInSe2Thin Films journal October 1983

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Related Subjects

/427/136/423/438/
0-1
07-2
1-2
1-3
17
27
663-3
72-2
96-2
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