Ultra high vacuum pumping system and high sensitivity helium leak detector
Patent
·
OSTI ID:871296
- Yorktown, VA
An improved helium leak detection method and apparatus are disclosed which increase the leak detection sensitivity to 10.sup.-13 atm cc s.sup.-1. The leak detection sensitivity is improved over conventional leak detectors by completely eliminating the use of o-rings, equipping the system with oil-free pumping systems, and by introducing measured flows of nitrogen at the entrances of both the turbo pump and backing pump to keep the system free of helium background. The addition of dry nitrogen flows to the system reduces backstreaming of atmospheric helium through the pumping system as a result of the limited compression ratios of the pumps for helium.
- Research Organization:
- SOUTHEASTERN UNIV RESCH ASSN
- DOE Contract Number:
- AC05-84ER40150
- Assignee:
- Southeastern Univ. Research Assn. (Newport News, VA)
- Patent Number(s):
- US 5703281
- OSTI ID:
- 871296
- Country of Publication:
- United States
- Language:
- English
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-1
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/73/
10
addition
apparatus
atm
atm cc
atmospheric
background
backstreaming
cc
completely
compression
compression ratio
compression ratios
conventional
detection
detection method
detection sensitivity
detector
detectors
disclosed
dry
eliminating
entrances
equipping
flows
free
helium
helium leak
improved
increase
introducing
leak
leak detection
leak detector
limited
measured
method
nitrogen
o-rings
oil-free
pump
pumping
pumping systems
pumps
ratios
reduces
result
sensitivity
systems
turbo
ultra
vacuum
vacuum pump
vacuum pumping
-13
/73/
10
addition
apparatus
atm
atm cc
atmospheric
background
backstreaming
cc
completely
compression
compression ratio
compression ratios
conventional
detection
detection method
detection sensitivity
detector
detectors
disclosed
dry
eliminating
entrances
equipping
flows
free
helium
helium leak
improved
increase
introducing
leak
leak detection
leak detector
limited
measured
method
nitrogen
o-rings
oil-free
pump
pumping
pumping systems
pumps
ratios
reduces
result
sensitivity
systems
turbo
ultra
vacuum
vacuum pump
vacuum pumping