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Compact mass spectrometer for plasma discharge ion analysis

Patent ·
OSTI ID:871061
 [1]
  1. Los Alamos, NM
+ Show Author Affiliations
A mass spectrometer and methods for mass spectrometry which are useful in characterizing a plasma. This mass spectrometer for determining type and quantity of ions present in a plasma is simple, compact, and inexpensive. It accomplishes mass analysis in a single step, rather than the usual two-step process comprised of ion extraction followed by mass filtering. Ions are captured by a measuring element placed in a plasma and accelerated by a known applied voltage. Captured ions are bent into near-circular orbits by a magnetic field such that they strike a collector, producing an electric current. Ion orbits vary with applied voltage and proton mass ratio of the ions, so that ion species may be identified. Current flow provides an indication of quantity of ions striking the collector.
Research Organization:
Los Alamos National Laboratory (LANL), Los Alamos, NM
DOE Contract Number:
W-7405-ENG-36
Assignee:
Regents of University of California (Los Alamos, NM)
Patent Number(s):
US 5650618
OSTI ID:
871061
Country of Publication:
United States
Language:
English

References (4)

Measurement of ion species ratio in the plasma source ion implantation process journal May 1993
Composition of the oxygen plasmas from two inductively coupled sources
  • Tuszewski, M.; Scheuer, J. T.; Tobin, J. A.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 13, Issue 3 https://doi.org/10.1116/1.579838
journal May 1995
Mass spectrometric studies of positive ions in r.f. glow discharges journal April 1989
An omegatron mass spectrometer for plasma ion species analysis journal August 1990

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