A compact mass spectrometer for plasma discharge ion analysis
Journal Article
·
· Review of Scientific Instruments
- Los Alamos National Laboratory, Los Alamos, New Mexico 87545 (United States)
A simple, compact, and inexpensive mass spectrometer for ion species analysis in plasma processing experiments has been successfully operated. The above attractive attributes are made possible by a single-step mass analysis rather than the usual two-step process of ion extraction followed by mass filtering. Theory and data show that the single-step process can be used without compromising the accuracy of ion species concentrations for sufficiently low applied voltages and large front aperture separations. The instrument is small enough to be introduced in most plasma discharges for {ital in} {ital situ} rather than for edge studies. The mass spectrometer has a moderate resolution that is adequate for many applications. The instrument can be afforded by all researchers, can be easily built, and can be operated in steady-state or pulsed plasma discharges. {copyright} {ital 1996 American Institute of Physics.}
- OSTI ID:
- 284623
- Journal Information:
- Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 6 Vol. 67; ISSN 0034-6748; ISSN RSINAK
- Country of Publication:
- United States
- Language:
- English
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