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Title: A compact mass spectrometer for plasma discharge ion analysis

Abstract

A simple, compact, and inexpensive mass spectrometer for ion species analysis in plasma processing experiments has been successfully operated. The above attractive attributes are made possible by a single-step mass analysis rather than the usual two-step process of ion extraction followed by mass filtering. Theory and data show that the single-step process can be used without compromising the accuracy of ion species concentrations for sufficiently low applied voltages and large front aperture separations. The instrument is small enough to be introduced in most plasma discharges for {ital in} {ital situ} rather than for edge studies. The mass spectrometer has a moderate resolution that is adequate for many applications. The instrument can be afforded by all researchers, can be easily built, and can be operated in steady-state or pulsed plasma discharges. {copyright} {ital 1996 American Institute of Physics.}

Authors:
 [1]
  1. Los Alamos National Laboratory, Los Alamos, New Mexico 87545 (United States)
Publication Date:
OSTI Identifier:
284623
Resource Type:
Journal Article
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 67; Journal Issue: 6; Other Information: PBD: Jun 1996
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION; PLASMA DIAGNOSTICS; MASS SPECTROMETERS; OPERATION; ELECTRIC DISCHARGES; RESOLUTION; DESIGN; BEAM EXTRACTION; ION BEAMS

Citation Formats

Tuszewski, M. A compact mass spectrometer for plasma discharge ion analysis. United States: N. p., 1996. Web. doi:10.1063/1.1147039.
Tuszewski, M. A compact mass spectrometer for plasma discharge ion analysis. United States. https://doi.org/10.1063/1.1147039
Tuszewski, M. 1996. "A compact mass spectrometer for plasma discharge ion analysis". United States. https://doi.org/10.1063/1.1147039.
@article{osti_284623,
title = {A compact mass spectrometer for plasma discharge ion analysis},
author = {Tuszewski, M},
abstractNote = {A simple, compact, and inexpensive mass spectrometer for ion species analysis in plasma processing experiments has been successfully operated. The above attractive attributes are made possible by a single-step mass analysis rather than the usual two-step process of ion extraction followed by mass filtering. Theory and data show that the single-step process can be used without compromising the accuracy of ion species concentrations for sufficiently low applied voltages and large front aperture separations. The instrument is small enough to be introduced in most plasma discharges for {ital in} {ital situ} rather than for edge studies. The mass spectrometer has a moderate resolution that is adequate for many applications. The instrument can be afforded by all researchers, can be easily built, and can be operated in steady-state or pulsed plasma discharges. {copyright} {ital 1996 American Institute of Physics.}},
doi = {10.1063/1.1147039},
url = {https://www.osti.gov/biblio/284623}, journal = {Review of Scientific Instruments},
number = 6,
volume = 67,
place = {United States},
year = {Sat Jun 01 00:00:00 EDT 1996},
month = {Sat Jun 01 00:00:00 EDT 1996}
}