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Large area, surface discharge pumped, vacuum ultraviolet light source

Patent ·
OSTI ID:870740
 [1];  [2]
  1. Santa Fe, NM
  2. Los Alamos, NM
+ Show Author Affiliations

Large area, surface discharge pumped, vacuum ultraviolet (VUV) light source. A contamination-free VUV light source having a 225 cm.sup.2 emission area in the 240-340 nm region of the electromagnetic spectrum with an average output power in this band of about 2 J/cm.sup.2 at a wall-plug efficiency of approximately 5% is described. Only ceramics and metal parts are employed in this surface discharge source. Because of the contamination-free, high photon energy and flux, and short pulse characteristics of the source, it is suitable for semiconductor and flat panel display material processing.

Research Organization:
Los Alamos National Laboratory (LANL), Los Alamos, NM
DOE Contract Number:
W-7405-ENG-36
Assignee:
Regents of University of California (Alameda, CA)
Patent Number(s):
US 5585641
OSTI ID:
870740
Country of Publication:
United States
Language:
English

References (2)

High-power 1 μsec ultraviolet radiation source for pumping of gas lasers journal August 1976
Ultraviolet spectral efficiencies of surface-spark discharges with emphasis on the iodine photodissociation laser pumpband journal January 1977

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