Large area, surface discharge pumped, vacuum ultraviolet light source
Patent
·
OSTI ID:415764
Large area, surface discharge pumped, vacuum ultraviolet (VUV) light source is disclosed. A contamination-free VUV light source having a 225 cm{sup 2} emission area in the 240-340 nm region of the electromagnetic spectrum with an average output power in this band of about 2 J/cm{sup 2} at a wall-plug efficiency of approximately 5% is described. Only ceramics and metal parts are employed in this surface discharge source. Because of the contamination-free, high photon energy and flux, and short pulse characteristics of the source, it is suitable for semiconductor and flat panel display material processing. 3 figs.
- Research Organization:
- University of California
- DOE Contract Number:
- W-7405-ENG-36
- Assignee:
- Univ. of California, Alameda, CA (United States)
- Patent Number(s):
- US 5,585,641/A/
- Application Number:
- PAN: 8-448,242
- OSTI ID:
- 415764
- Country of Publication:
- United States
- Language:
- English
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