Magnetic force microscopy method and apparatus to detect and image currents in integrated circuits

Campbell, Ann N; Anderson, Richard E

Title: Magnetic force microscopy method and apparatus to detect and image currents in integrated circuits

Patent · Sun Jan 01 00:00:00 EST 1995

OSTI ID:870148

Campbell, Ann N ^[1]; Anderson, Richard E ^[2]

13170-B Central SE #188, Albuquerque, NM 87123
2800 Tennessee NE, Albuquerque, NM 87110

A magnetic force microscopy method and improved magnetic tip for detecting and quantifying internal magnetic fields resulting from current of integrated circuits. Detection of the current is used for failure analysis, design verification, and model validation. The interaction of the current on the integrated chip with a magnetic field can be detected using a cantilevered magnetic tip. Enhanced sensitivity for both ac and dc current and voltage detection is achieved with voltage by an ac coupling or a heterodyne technique. The techniques can be used to extract information from analog circuits.

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Research Organization:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); American Telephone and Telegraph Company

Sponsoring Organization:: USDOE

DOE Contract Number:: AC04-76DP00789; AC04-94AL85000

Assignee:: Campbell, Ann. N. (13170-B Central SE #188, Albuquerque, NM 87123);Anderson, Richard E. (2800 Tennessee NE, Albuquerque, NM 87110);Cole, Jr., Edward I. (2116 White Cloud NE, Albuquerque, NM 87112)

Patent Number(s):: US 5465046

OSTI ID:: 870148

Country of Publication:: United States

Language:: English

References (12)

Batch fabricated sensors for magnetic force microscopy Grütter, P.; Rugar, D.; Mamin, H. J. Applied Physics Letters, Vol. 57, Issue 17 https://doi.org/10.1063/1.104030	journal	October 1990
Probe calibration in magnetic force microscopy Göddenhenrich, T.; Lemke, H.; Mück, M. Applied Physics Letters, Vol. 57, Issue 24 https://doi.org/10.1063/1.103827	journal	December 1990
Magnetic force microscopy/current contrast imaging: A new technique for internal current probing of ICs Campbell, Ann N.; Cole, Edward I.; Dodd, Bruce A. Microelectronic Engineering, Vol. 24, Issue 1-4 https://doi.org/10.1016/0167-9317(94)90050-7	journal	March 1994
Voltage-contrast scanning probe microscopy Bloom, D. M. Microelectronic Engineering, Vol. 24, Issue 1-4 https://doi.org/10.1016/0167-9317(94)90049-3	journal	March 1994
Force microscopy of magnetization patterns in longitudinal recording media Mamin, H. J.; Rugar, D.; Stern, J. E. Applied Physics Letters, Vol. 53, Issue 16 https://doi.org/10.1063/1.99952	journal	October 1988
An Approach to Chip-Internal Current Monitoring and Measurement Using an Electron beam Tester Helmreich, K.; Nagel, P.; Wolz, W. 1991, International Test Conference, 1991, Proceedings. International Test Conference https://doi.org/10.1109/TEST.1991.519517	conference	January 1991
Magnetic imaging by ‘‘force microscopy’’ with 1000 Å resolution Martin, Y.; Wickramasinghe, H. K. Applied Physics Letters, Vol. 50, Issue 20 https://doi.org/10.1063/1.97800	journal	May 1987
Internal current probing of integrated circuits using magnetic force microscopy Campbell, A. N.; Cole, E. I.; Dodd, B. A. Proceedings of IEEE International Reliability Physics Symposium, 31st Annual Proceedings Reliability Physics 1993 https://doi.org/10.1109/RELPHY.1993.283328	conference	January 1993
Magnetic force microscopy with 25 nm resolution Hobbs, Philip C. D.; Abraham, David W.; Wickramasinghe, H. K. Applied Physics Letters, Vol. 55, Issue 22 https://doi.org/10.1063/1.102017	journal	November 1989
Frequency modulation detection using high‐ Q cantilevers for enhanced force microscope sensitivity Albrecht, T. R.; Grütter, P.; Horne, D. Journal of Applied Physics, Vol. 69, Issue 2 https://doi.org/10.1063/1.347347	journal	January 1991
High‐resolution magnetic imaging of domains in TbFe by force microscopy Martin, Y.; Rugar, D.; Wickramasinghe, H. K. Applied Physics Letters, Vol. 52, Issue 3 https://doi.org/10.1063/1.99482	journal	January 1988
Magnetic force microscopy with batch‐fabricated force sensors Grütter, P.; Rugar, D.; Mamin, H. J. Journal of Applied Physics, Vol. 69, Issue 8 https://doi.org/10.1063/1.347856	journal	April 1991

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heterodyne
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failure analysis
dc current
analog circuit
microscopy method
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heterodyne technique
improved magnetic
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Title: Magnetic force microscopy method and apparatus to detect and image currents in integrated circuits

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References (12)

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