Solar cells utilizing pulsed-energy crystallized microcrystalline/polycrystalline silicon
Patent
·
OSTI ID:870106
- Pleasanton, CA
- Beaverton, OR
A process for producing multi-terminal devices such as solar cells wherein a pulsed high energy source is used to melt and crystallize amorphous silicon deposited on a substrate which is intolerant to high processing temperatures, whereby to amorphous silicon is converted into a microcrystalline/polycrystalline phase. Dopant and hydrogenization can be added during the fabrication process which provides for fabrication of extremely planar, ultra shallow contacts which results in reduction of non-current collecting contact volume. The use of the pulsed energy beams results in the ability to fabricate high efficiency microcrystalline/polycrystalline solar cells on the so-called low-temperature, inexpensive plastic substrates which are intolerant to high processing temperatures.
- Research Organization:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA
- DOE Contract Number:
- W-7405-ENG-48
- Assignee:
- Regents of University of California (Oakland, CA)
- Patent Number(s):
- US 5456763
- OSTI ID:
- 870106
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
/136/257/438/
ability
added
amorphous
amorphous silicon
beams
beams result
cells
cells utilizing
collecting
contact
contacts
converted
crystalline phase
crystalline silicon
crystallize
crystallized
current collecting
deposited
devices
dopant
efficiency
energy
energy beam
energy beams
energy source
extremely
fabricate
fabrication
fabrication process
hydrogenization
inexpensive
intolerant
low-temperature
melt
microcrystalline
multi-terminal
non-current
phase
planar
plastic
plastic substrate
plastic substrates
polycrystalline
polycrystalline silicon
polycrystalline solar
process
processing
processing temperature
processing temperatures
producing
provides
pulsed
pulsed energy
pulsed-energy
reduction
results
shallow
silicon
silicon deposited
so-called
solar
solar cell
solar cells
source
substrate
substrates
temperatures
ultra
utilizing
utilizing pulsed
volume
whereby
ability
added
amorphous
amorphous silicon
beams
beams result
cells
cells utilizing
collecting
contact
contacts
converted
crystalline phase
crystalline silicon
crystallize
crystallized
current collecting
deposited
devices
dopant
efficiency
energy
energy beam
energy beams
energy source
extremely
fabricate
fabrication
fabrication process
hydrogenization
inexpensive
intolerant
low-temperature
melt
microcrystalline
multi-terminal
non-current
phase
planar
plastic
plastic substrate
plastic substrates
polycrystalline
polycrystalline silicon
polycrystalline solar
process
processing
processing temperature
processing temperatures
producing
provides
pulsed
pulsed energy
pulsed-energy
reduction
results
shallow
silicon
silicon deposited
so-called
solar
solar cell
solar cells
source
substrate
substrates
temperatures
ultra
utilizing
utilizing pulsed
volume
whereby