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Reflection soft X-ray microscope and method

Patent ·
OSTI ID:868629
 [1];  [2];  [1]
  1. Princeton, NJ
  2. Lawrenceville, NJ
+ Show Author Affiliations
A reflection soft X-ray microscope is provided by generating soft X-ray beams, condensing the X-ray beams to strike a surface of an object at a predetermined angle, and focusing the X-ray beams reflected from the surface onto a detector, for recording an image of the surface or near surface features of the object under observation.
Research Organization:
Princeton Plasma Physics Laboratory (PPPL), Princeton, NJ
DOE Contract Number:
AC02-76CH03073
Assignee:
Trustees of Princeton University (Princeton, NJ)
Patent Number(s):
US 5177774
OSTI ID:
868629
Country of Publication:
United States
Language:
English

References (2)

Contact microscopy with a soft X-ray laser journal July 1990
X-Ray Microscopes journal February 1991

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Related Subjects

/378/
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beams
condensing
detector
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near
near surface
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predetermined
predetermined angle
provided
ray beams
recording
reflected
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soft
soft x-ray
strike
surface
surface feature
surface features
x-ray
x-ray beam
x-ray beams
x-ray microscope