Reflection soft X-ray microscope and method
Patent
·
OSTI ID:6036473
A reflection soft X-ray microscope is provided by generating soft X-ray beams, condensing the X-ray beams to strike a surface of an object at a predetermined angle, and focusing the X-ray beams reflected from the surface onto a detector, for recording an image of the surface or near surface features of the object under observation.
- DOE Contract Number:
- AC02-76CH03073
- Assignee:
- Princeton Univ., NJ (United States)
- Patent Number(s):
- US 5177774; A
- Application Number:
- PPN: US 7-749277
- OSTI ID:
- 6036473
- Resource Relation:
- Patent File Date: 23 Aug 1991
- Country of Publication:
- United States
- Language:
- English
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