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U.S. Department of Energy
Office of Scientific and Technical Information

Reflection soft X-ray microscope and method

Patent ·
OSTI ID:6036473
A reflection soft X-ray microscope is provided by generating soft X-ray beams, condensing the X-ray beams to strike a surface of an object at a predetermined angle, and focusing the X-ray beams reflected from the surface onto a detector, for recording an image of the surface or near surface features of the object under observation.
DOE Contract Number:
AC02-76CH03073
Assignee:
Princeton Univ., NJ (United States)
Patent Number(s):
A; US 5177774
Application Number:
PPN: US 7-749277
OSTI ID:
6036473
Country of Publication:
United States
Language:
English