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Light transmissive electrically conductive oxide electrode formed in the presence of a stabilizing gas

Patent ·
OSTI ID:868415
 [1];  [2]
  1. Cottage Grove, MN
  2. Maplewood, MN
+ Show Author Affiliations
A light transmissive, electrically conductive oxide is doped with a stabilizing gas such as H.sub.2 and H.sub.2 O. The oxide is formed by sputtering a light transmissive, electrically conductive oxide precursor onto a substrate at a temperature from 20.degree. C. to 300.degree. C. Sputtering occurs in a gaseous mixture including a sputtering gas and the stabilizing gas.
Assignee:
Minnesota Mining and Manufacturing Company (St. Paul, MN)
Patent Number(s):
US 5135581
Application Number:
07/682,542
OSTI ID:
868415
Country of Publication:
United States
Language:
English

References (5)

Preparation of transparent conducting zinc oxide films by reactive sputtering journal August 1987
DC magnetron reactively sputtered indiumtinoxide films produced using argonoxygenhydrogen mixtures journal June 1990
Transparent conducting electrodes on silicon journal May 1987
Heat treatment in hydrogen gas and plasma for transparent conducting oxide films such as ZnO, SnO2 and indium tin oxide journal September 1989
Scattering matrix analysis of electron transport in disordered Aharonov–Bohm interferometers and ballistic constrictions journal November 1990

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doped
electrically
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electrode
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gas
gaseous
gaseous mixture
including
light
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mixture
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oxide precursor
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presence
sputtering
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stabilizing
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