Light transmissive electrically conductive oxide electrode formed in the presence of a stabilizing gas

Patent · Tue Aug 04 04:00:00 EDT 1992

OSTI ID:7046381

Tran, N T; Gilbert, J R

A light transmissive, electrically conductive oxide is doped with a stabilizing gas such as H[sub 2] and H[sub 2]O. The oxide is formed by sputtering a light transmissive, electrically conductive oxide precursor onto a substrate at a temperature from 20 C to 300 C. Sputtering occurs in a gaseous mixture including a sputtering gas and the stabilizing gas. 7 figs.

• Assignee: Minnesota Mining and Manufacturing Co., St. Paul, MN (United States)
• Patent Number(s): US 5135581; A
• Application Number: PPN: US 7-682542
• OSTI ID: 7046381
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360601* -- Other Materials-- Preparation & Manufacture
ANTIREFLECTION COATINGS
CHALCOGENIDES
COATINGS
DOPED MATERIALS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELEMENTS
FABRICATION
FLUIDS
GASES
HYDROGEN
LIGHT TRANSMISSION
MATERIALS
NONMETALS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SPUTTERING
VAPORS
WATER VAPOR