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Title: Etching process for improving the strength of a laser-machined silicon-based ceramic article

Abstract

A process for improving the strength of laser-machined articles formed of a silicon-based ceramic material such as silicon nitride, in which the laser-machined surface is immersed in an etching solution of hydrofluoric acid and nitric acid for a duration sufficient to remove substantially all of a silicon film residue on the surface but insufficient to allow the solution to unduly attack the grain boundaries of the underlying silicon nitride substrate. This effectively removes the silicon film as a source of cracks that otherwise could propagate downwardly into the silicon nitride substrate and significantly reduce its strength.

Inventors:
 [1];  [2];  [1]
  1. Palos Verdes, CA
  2. Covina, CA
Publication Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
OSTI Identifier:
867862
Patent Number(s):
US 5022957
Assignee:
University of Southern California (Los Angeles, CA)
DOE Contract Number:  
AC05-84OR21400
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
etching; process; improving; strength; laser-machined; silicon-based; ceramic; article; articles; formed; material; silicon; nitride; surface; immersed; solution; hydrofluoric; acid; nitric; duration; sufficient; remove; substantially; film; residue; insufficient; allow; unduly; attack; grain; boundaries; underlying; substrate; effectively; removes; source; cracks; otherwise; propagate; downwardly; significantly; reduce; significantly reduce; silicon film; hydrofluoric acid; remove substantially; ceramic article; etching process; ceramic material; grain boundaries; silicon nitride; nitric acid; effectively removes; articles formed; based ceramic; silicon-based ceramic; move substantially; ceramic mater; machined surface; effectively remove; /216/65/134/252/

Citation Formats

Copley, Stephen M, Tao, Hongyi, and Todd-Copley, Judith A. Etching process for improving the strength of a laser-machined silicon-based ceramic article. United States: N. p., 1991. Web.
Copley, Stephen M, Tao, Hongyi, & Todd-Copley, Judith A. Etching process for improving the strength of a laser-machined silicon-based ceramic article. United States.
Copley, Stephen M, Tao, Hongyi, and Todd-Copley, Judith A. Tue . "Etching process for improving the strength of a laser-machined silicon-based ceramic article". United States. https://www.osti.gov/servlets/purl/867862.
@article{osti_867862,
title = {Etching process for improving the strength of a laser-machined silicon-based ceramic article},
author = {Copley, Stephen M and Tao, Hongyi and Todd-Copley, Judith A},
abstractNote = {A process for improving the strength of laser-machined articles formed of a silicon-based ceramic material such as silicon nitride, in which the laser-machined surface is immersed in an etching solution of hydrofluoric acid and nitric acid for a duration sufficient to remove substantially all of a silicon film residue on the surface but insufficient to allow the solution to unduly attack the grain boundaries of the underlying silicon nitride substrate. This effectively removes the silicon film as a source of cracks that otherwise could propagate downwardly into the silicon nitride substrate and significantly reduce its strength.},
doi = {},
url = {https://www.osti.gov/biblio/867862}, journal = {},
number = ,
volume = ,
place = {United States},
year = {1991},
month = {1}
}

Patent:

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