X-ray beamsplitter
- Livermore, CA
- Mountain View, CA
- Modesto, CA
An x-ray beamsplitter which splits an x-ray beam into two coherent parts by reflecting and transmitting some fraction of an incident beam has applications for x-ray interferometry, x-ray holography, x-ray beam manipulation, and x-ray laser cavity output couplers. The beamsplitter is formed of a wavelength selective multilayer thin film supported by a very thin x-ray transparent membrane. The beamsplitter resonantly transmits and reflects x-rays through thin film interference effects. A thin film is formed of 5-50 pairs of alternate Mo/Si layers with a period of 20-250 A. The support membrane is 10-200 nm of silicon nitride or boron nitride. The multilayer/support membrane structure is formed across a window in a substrate by first forming the structure on a solid substrate and then forming a window in the substrate to leave a free-standing structure over the window.
- Research Organization:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- DOE Contract Number:
- W-7405-ENG-48
- Assignee:
- United States Department of Energy (Washington, DC)
- Patent Number(s):
- US 4870648
- OSTI ID:
- 867118
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
beamsplitter
splits
beam
coherent
reflecting
transmitting
fraction
incident
applications
interferometry
holography
manipulation
laser
cavity
output
couplers
formed
wavelength
selective
multilayer
film
supported
transparent
membrane
resonantly
transmits
reflects
x-rays
interference
effects
5-50
pairs
alternate
layers
period
20-250
support
10-200
nm
silicon
nitride
boron
structure
window
substrate
forming
solid
leave
free-standing
x-ray beams
output coupler
support membrane
laser cavity
x-ray beam
x-ray laser
silicon nitride
boron nitride
incident beam
solid substrate
transparent membrane
x-ray beamsplitter
interference effect
ray beams
beam manipulation
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