X-ray beamsplitter

Patent · Sun Jan 01 04:00:00 EST 1989

OSTI ID:867118

Ceglio, Natale M ^[1]; Stearns, Daniel S ^[2]; Hawryluk, Andrew M ^[3]

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1. Livermore, CA
2. Mountain View, CA
3. Modesto, CA

An x-ray beamsplitter which splits an x-ray beam into two coherent parts by reflecting and transmitting some fraction of an incident beam has applications for x-ray interferometry, x-ray holography, x-ray beam manipulation, and x-ray laser cavity output couplers. The beamsplitter is formed of a wavelength selective multilayer thin film supported by a very thin x-ray transparent membrane. The beamsplitter resonantly transmits and reflects x-rays through thin film interference effects. A thin film is formed of 5-50 pairs of alternate Mo/Si layers with a period of 20-250 A. The support membrane is 10-200 nm of silicon nitride or boron nitride. The multilayer/support membrane structure is formed across a window in a substrate by first forming the structure on a solid substrate and then forming a window in the substrate to leave a free-standing structure over the window.

• Research Organization: Lawrence Livermore National Laboratory (LLNL), Livermore, CA
• DOE Contract Number: W-7405-ENG-48
• Assignee: United States Department of Energy (Washington, DC)
• Patent Number(s): US 4870648
• OSTI ID: 867118
• Country of Publication: United States
• Language: English

Related Subjects

/372/378/
10-200
20-250
5-50
alternate
applications
beam
beam manipulation
beamsplitter
boron
boron nitride
cavity
coherent
couplers
effects
film
formed
forming
fraction
free-standing
holography
incident
incident beam
interference
interference effect
interferometry
laser
laser cavity
layers
leave
manipulation
membrane
multilayer
nitride
nm
output
output coupler
pairs
period
ray beams
reflecting
reflects
resonantly
selective
silicon
silicon nitride
solid
solid substrate
splits
structure
substrate
support
support membrane
supported
transmits
transmitting
transparent
transparent membrane
wavelength
window
x-ray
x-ray beam
x-ray beams
x-ray beamsplitter
x-ray laser
x-rays