X-ray beamsplitter

Patent · Tue Sep 26 04:00:00 EDT 1989

OSTI ID:6949230

Ceglio, N M; Stearns, D S; Hawryluk, A M; Barbee, Jr, T W

This patent describes an x-ray beamsplitter which splits an x-ray beam into two coherent parts by reflecting and transmitting some fraction of an incident beam has applications for x-ray interferometry, x-ray holography, x-ray beam manipulation, and x-ray laser cavity output couplers. The beamsplitter is formed of a wavelength selective multilayer thin film supported by a very thin x-ray transparent membrane. The beamsplitter resonantly transmits and reflects x-rays through thin film interference effects. A thin film is formed of 5-50 pairs of alternate Mo/Si layers with a period of 20-250 A. The support membrane is 10-200 nm of silicon nitride or boron nitride. The multilayer/support membrane structure is formed across a window in a substrate by first forming the structure on a solid substrate and then forming a window in the substrate to leave a free-standing structure over the window.

• Assignee: Dept. of Energy, Washington, DC
• Patent Number(s): A; US 4870648
• Application Number: PPN: US 7-082468/A/A
• OSTI ID: 6949230
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
426002* -- Engineering-- Lasers & Masers-- (1990-)
440800 -- Miscellaneous Instrumentation-- (1990-)
47 OTHER INSTRUMENTATION
BEAM OPTICS
BEAM SPLITTING
ELEMENTS
EQUIPMENT
HOLOGRAPHY
INTERFEROMETRY
LASERS
MEASURING INSTRUMENTS
METALS
MOLYBDENUM
RADIATION SOURCES
SEMIMETALS
SILICON
TRANSITION ELEMENTS
X-RAY EQUIPMENT
X-RAY LASERS
X-RAY SOURCES