Method and apparatus for removing and preventing window deposition during photochemical vapor deposition (photo-CVD) processes

Patent · Sun Jan 01 04:00:00 EST 1989

OSTI ID:866895

Tsuo, Simon ^[1]; Langford, Alison A ^[2]

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1. Lakewood, CO
2. Boulder, CO

Unwanted build-up of the film deposited on the transparent light-transmitting window of a photochemical vacuum deposition (photo-CVD) chamber is eliminated by flowing an etchant into the part of the photolysis region in the chamber immediately adjacent the window and remote from the substrate and from the process gas inlet. The respective flows of the etchant and the process gas are balanced to confine the etchant reaction to the part of the photolysis region proximate to the window and remote from the substrate. The etchant is preferably one that etches film deposit on the window, does not etch or affect the window itself, and does not produce reaction by-products that are deleterious to either the desired film deposited on the substrate or to the photolysis reaction adjacent the substrate.

• Research Organization: MIDWEST RESEARCH INSTITUTE
• DOE Contract Number: AC02-83CH10093
• Assignee: Midwest Research Institute (Kansas City, MO)
• Patent Number(s): US 4816294
• OSTI ID: 866895
• Country of Publication: United States
• Language: English

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/427/136/216/
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