Source replenishment device for vacuum deposition

Patent · Fri Jan 01 04:00:00 EST 1988

OSTI ID:866735

Hill, Ronald A ^[1]

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1. Albuquerque, NM

A material source replenishment device for use with a vacuum deposition apparatus. The source replenishment device comprises an intermittent motion producing gear arrangement disposed within the vacuum deposition chamber. An elongated rod having one end operably connected to the gearing arrangement is provided with a multiarmed head at the opposite end disposed adjacent the heating element of the vacuum deposition apparatus. An inverted U-shaped source material element is releasably attached to the outer end of each arm member whereby said multiarmed head is moved to locate a first of said material elements above said heating element, whereupon said multiarmed head is lowered to engage said material element with the heating element and further lowered to release said material element on the heating element. After vaporization of said material element, second and subsequent material elements may be provided to the heating element without the need for opening the vacuum deposition apparatus to the atmosphere.

• Research Organization: AT & T CORP
• DOE Contract Number: AC04-76DP00789
• Assignee: United States of America as represented by United States (Washington, DC)
• Patent Number(s): US 4776299
• OSTI ID: 866735
• Country of Publication: United States
• Language: English

Related Subjects

/118/
adjacent
apparatus
arm
arrangement
atmosphere
attached
chamber
comprises
connected
deposition
deposition apparatus
deposition chamber
device
device comprises
disposed
disposed adjacent
element
elements
elongated
engage
gear
gear arrangement
gearing
head
heating
heating element
intermittent
inverted
inverted u-shaped
locate
lowered
material
motion
moved
multiarmed
operably
operably connected
opposite
outer
producing
provided
releasably
releasably attach
release
replenishment
replenishment device
rod
source
source material
source replenishment
subsequent
u-shaped
vacuum
vacuum deposition
vaporization
whereby
whereupon