Source replenishment device for vacuum deposition
- Albuquerque, NM
A material source replenishment device for use with a vacuum deposition apparatus. The source replenishment device comprises an intermittent motion producing gear arrangement disposed within the vacuum deposition chamber. An elongated rod having one end operably connected to the gearing arrangement is provided with a multiarmed head at the opposite end disposed adjacent the heating element of the vacuum deposition apparatus. An inverted U-shaped source material element is releasably attached to the outer end of each arm member whereby said multiarmed head is moved to locate a first of said material elements above said heating element, whereupon said multiarmed head is lowered to engage said material element with the heating element and further lowered to release said material element on the heating element. After vaporization of said material element, second and subsequent material elements may be provided to the heating element without the need for opening the vacuum deposition apparatus to the atmosphere.
- Research Organization:
- AT&T
- DOE Contract Number:
- AC04-76DP00789
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Number(s):
- US 4776299
- OSTI ID:
- 866735
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
replenishment
device
vacuum
deposition
material
apparatus
comprises
intermittent
motion
producing
gear
arrangement
disposed
chamber
elongated
rod
operably
connected
gearing
provided
multiarmed
head
opposite
adjacent
heating
element
inverted
u-shaped
releasably
attached
outer
arm
whereby
moved
locate
elements
whereupon
lowered
engage
release
vaporization
subsequent
atmosphere
vacuum deposition
heating element
disposed adjacent
deposition chamber
device comprises
source material
operably connected
deposition apparatus
replenishment device
source replenishment
inverted u-shaped
gear arrangement
releasably attach
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