Starter for inductively coupled plasma tube

Patent · Fri Jan 01 04:00:00 EST 1988

OSTI ID:866695

Hull, Donald E ^[1]; Bieniewski, Thomas M ^[2]

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1. 969 Nambe Loop, Los Alamos, NM 87544
2. 285 Donna Ave., Los Alamos, NM 87544

A starter assembly is provided for use with an inductively coupled plasma (ICP) tube to reliably initate a plasma at internal pressures above about 30 microns. A conductive probe is inserted within the inductor coil about the tube and insulated from the tube shield assembly. A capacitive circuit is arranged for momentarily connecting a high voltage radio-frequency generator to the probe while simultaneously energizing the coil. When the plasma is initiated the probe is disconnected from the generator and electrically connected to the shield assembly for operation.

• Research Organization: Los Alamos National Laboratory (LANL), Los Alamos, NM
• DOE Contract Number: W-7405-ENG-36
• Assignee: Hull, Donald E. (969 Nambe Loop, Los Alamos, NM 87544);Bieniewski, Thomas M. (285 Donna Ave., Los Alamos, NM 87544)
• Patent Number(s): US 4766351
• OSTI ID: 866695
• Country of Publication: United States
• Language: English

Related Subjects

/315/219/313/
30
arranged
assembly
capacitive
circuit
coil
conductive
connected
connecting
coupled
coupled plasma
disconnected
electrically
electrically connected
energizing
frequency generator
generator
icp
inductively
inductively coupled
inductor
initate
initiated
inserted
insulated
internal
internal pressure
internal pressures
microns
momentarily
operation
plasma
plasma tube
pressures
probe
provided
radio-frequency
reliably
shield
simultaneously
starter
tube
voltage
voltage radio