Skip to main content
U.S. Department of Energy
Office of Scientific and Technical Information

Starter for inductively coupled plasma tube

Patent ·
OSTI ID:7068459

A starter assembly is provided for use with an inductively coupled plasma (ICP) tube to reliably initiate a plasma at internal pressures above about 30 microns. A conductive probe is inserted within the inductor coil about the tube and insulated from the tube shield assembly. A capacitive circuit is arranged for momentarily connecting a high voltage radio-frequency generator to the probe while simultaneously energizing the coil. When the plasma is initiated the probe is disconnected from the generator and electrically connected to the shield assembly for operation. 1 fig.

DOE Contract Number:
W-7405-ENG-36
Assignee:
PTO; EDB-94-117920
Patent Number(s):
A; US 4766351
Application Number:
PPN: US 7-067080
OSTI ID:
7068459
Country of Publication:
United States
Language:
English