Starter for inductively coupled plasma tube
Patent
·
OSTI ID:7068459
A starter assembly is provided for use with an inductively coupled plasma (ICP) tube to reliably initiate a plasma at internal pressures above about 30 microns. A conductive probe is inserted within the inductor coil about the tube and insulated from the tube shield assembly. A capacitive circuit is arranged for momentarily connecting a high voltage radio-frequency generator to the probe while simultaneously energizing the coil. When the plasma is initiated the probe is disconnected from the generator and electrically connected to the shield assembly for operation. 1 fig.
- DOE Contract Number:
- W-7405-ENG-36
- Assignee:
- PTO; EDB-94-117920
- Patent Number(s):
- A; US 4766351
- Application Number:
- PPN: US 7-067080
- OSTI ID:
- 7068459
- Country of Publication:
- United States
- Language:
- English
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