Method of making radio frequency ion source antenna
- Alamo, CA
- Hercules, CA
In the method, the radio frequency (RF) antenna is made by providing a clean coil made of copper tubing or other metal conductor, which is coated with a tacky organic binder, and then with a powdered glass frit, as by sprinkling the frit uniformly over the binder. The coil is then heated internally in an inert gas atmosphere, preferably by passing an electrical heating current along the coil. Initially, the coil is internally heated to about 200.degree. C. to boil off the water from the binder, and then to about 750.degree. C.-850.degree. C. to melt the glass frit, while also burning off the organic binder. The melted frit forms a molten glass coating on the metal coil, which is then cooled to solidify the glass, so that the metal coil is covered with a thin continuous homogeneous impervious glass coating of substantially uniform thickness. The glass coating affords complete electrical insulation and complete dielectric protection for the metal coil of the RF antenna, to withstand voltage breakdown and to prevent sputtering, while also doubling the plasma generating efficiency of the RF antenna, when energized with RF power in the vacuum chamber of an ion source for a particle accelerator or the like. The glass frit preferably contains apprxoimately 45% lead oxide.
- Research Organization:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
- DOE Contract Number:
- AC03-76SF00098
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Number(s):
- US 4725449
- OSTI ID:
- 866502
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
radio
frequency
source
antenna
rf
providing
clean
coil
copper
tubing
metal
conductor
coated
tacky
organic
binder
powdered
glass
frit
sprinkling
uniformly
heated
internally
inert
gas
atmosphere
preferably
passing
electrical
heating
current
initially
200
degree
boil
water
750
-850
melt
burning
melted
forms
molten
coating
cooled
solidify
covered
continuous
homogeneous
impervious
substantially
uniform
thickness
affords
complete
insulation
dielectric
protection
withstand
voltage
breakdown
prevent
sputtering
doubling
plasma
generating
efficiency
energized
power
vacuum
chamber
particle
accelerator
contains
apprxoimately
45
lead
oxide
rf antenna
electrical heating
preferably contains
preferably contain
glass coating
organic binder
particle accelerator
glass frit
metal conductor
uniform thickness
radio frequency
vacuum chamber
inert gas
substantially uniform
rf power
molten glass
gas atmosphere
electrical insulation
lead oxide
voltage breakdown
heating current
electrical heat
internally heated
complete electrical
plasma generating
metal conduct
particle accelera
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