Di-p-xylylene polymer and method for making the same
- Los Alamos, NM
A method and apparatus for forming an improved poly-p-xylylene film. Solid di-para-xylylene dimer is sublimed in a sublimation furnace at approximately 100.degree. to 200.degree. C. and subsequently conducted to a pyrolysis furnace where it is pyrolyzed to the diradical p-xylylene monomer while in the vapor state at approximately 600 degrees C. The diradical monomer is then introduced into a deposition chamber for deposition onto a suitable substrate. The deposition chamber includes electrodes for producing a low pressure plasma through which the diradical monomer passes prior to deposition. The interaction of the diradical monomer with the low pressure plasma results in the formation of poly-p-xylylene film which is exceptionally hard and thermally stable.
- Research Organization:
- Los Alamos National Laboratory (LANL), Los Alamos, NM
- DOE Contract Number:
- W-7405-ENG-36
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Number(s):
- US 4500562
- OSTI ID:
- 865352
- Country of Publication:
- United States
- Language:
- English
Similar Records
Improved di-p-xylylene polymer and apparatus and method for making the same
Gas phas thermal reactions of aromatic ethers; Generation of p-xylylene and its derivative by zinc induced dehalogenation
Related Subjects
100
200
600
apparatus
approximately
chamber
conducted
degree
degrees
deposition
deposition chamber
di-p-xylylene
di-para-xylylene
dimer
diradical
electrodes
exceptionally
film
formation
forming
furnace
hard
improved
interaction
introduced
method
monomer
p-xylylene
passes
plasma
poly-p-xylylene
polymer
pressure
pressure plasma
prior
producing
pyrolysis
pyrolyzed
results
solid
stable
sublimation
sublimed
subsequently
substrate
suitable
suitable substrate
thermally
thermally stable
vapor