Layered ultra-thin coherent structures used as electrical resistors having low temperature coefficient of resistivity
Patent
·
OSTI ID:865051
- Argonne, IL
- Tucson, AZ
- Woodridge, IL
A thin film resistor having a controlled temperature coefficient of resistance (TCR) ranging from negative to positive degrees kelvin and having relatively high resistivity. The resistor is a multilayer superlattice crystal containing a plurality of alternating, ultra-thin layers of two different metals. TCR is varied by controlling the thickness of the individual layers. The resistor can be readily prepared by methods compatible with thin film circuitry manufacturing techniques.
- Research Organization:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- DOE Contract Number:
- W-31109-ENG-38
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Number(s):
- US 4454495
- OSTI ID:
- 865051
- Country of Publication:
- United States
- Language:
- English
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·
OSTI ID:865051
Related Subjects
layered
ultra-thin
coherent
structures
electrical
resistors
temperature
coefficient
resistivity
film
resistor
controlled
resistance
tcr
ranging
negative
positive
degrees
kelvin
relatively
multilayer
superlattice
crystal
containing
plurality
alternating
layers
metals
varied
controlling
thickness
individual
readily
prepared
methods
compatible
circuitry
manufacturing
techniques
individual layers
temperature coefficient
controlled temperature
dual layer
readily prepared
manufacturing techniques
superlattice crystal
film resistor
layer superlattice
film circuit
degrees kelvin
crystal containing
/338/505/
ultra-thin
coherent
structures
electrical
resistors
temperature
coefficient
resistivity
film
resistor
controlled
resistance
tcr
ranging
negative
positive
degrees
kelvin
relatively
multilayer
superlattice
crystal
containing
plurality
alternating
layers
metals
varied
controlling
thickness
individual
readily
prepared
methods
compatible
circuitry
manufacturing
techniques
individual layers
temperature coefficient
controlled temperature
dual layer
readily prepared
manufacturing techniques
superlattice crystal
film resistor
layer superlattice
film circuit
degrees kelvin
crystal containing
/338/505/