Layered ultra-thin coherent structures used as electrical resistors having low-temperature coefficient of resistivity
Patent
·
OSTI ID:5992491
A thin film resistor having a controlled temperature coefficient of resistance (TCR) ranging from negative to positive degrees kelvin and having relatively high resistivity. The resistor is a multilayer superlattice crystal containing a plurality of alternating, ultra-thin layers of two different metals. TCR is varied by controlling the thickness of the individual layers. The resistor can be readily prepared by methods compatible with thin film circuitry manufacturing techniques.
- DOE Contract Number:
- W-31-109-ENG-38
- Assignee:
- EDB-83-124526
- Application Number:
- ON: DE83013148
- OSTI ID:
- 5992491
- Country of Publication:
- United States
- Language:
- English
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