Ion source

Patent · Sat Dec 31 23:00:00 EST 1983

OSTI ID:864998

Leung, Ka-Ngo ^[1]; Ehlers, Kenneth W ^[2]

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1. Hercules, CA
2. Alamo, CA

A magnetic filter for an ion source reduces the production of undesired ion species and improves the ion beam quality. High-energy ionizing electrons are confined by the magnetic filter to an ion source region, where the high-energy electrons ionize gas molecules. One embodiment of the magnetic filter uses permanent magnets oriented to establish a magnetic field transverse to the direction of travel of ions from the ion source region to the ion extraction region. In another embodiment, low energy 16 eV electrons are injected into the ion source to dissociate gas molecules and undesired ion species into desired ion species.

• Research Organization: Lawrence Livermore National Laboratory (LLNL), Livermore, CA
• DOE Contract Number: W-7405-ENG-48
• Assignee: United States of America as represented by United States (Washington, DC)
• Patent Number(s): US 4447732
• OSTI ID: 864998
• Country of Publication: United States
• Language: English

Related Subjects

/250/315/376/
16
beam
beam quality
confined
desired
direction
dissociate
electrons
embodiment
energy
energy electron
energy electrons
energy ionizing
establish
extraction
extraction region
field
filter
gas
gas molecules
high-energy
high-energy electron
high-energy electrons
improves
injected
ionize
ionizing
ionizing electrons
magnetic
magnetic field
magnetic filter
magnets
molecules
oriented
permanent
permanent magnet
permanent magnets
production
quality
reduces
region
source
source reduces
species
transverse
travel
undesired