Improved ion source
Patent
·
OSTI ID:6368705
A magnetic filter for an ion source reduces the production of undesired ion species and improves the ion beam quality. High-energy ionizing electrons are confined by the magnetic filter to an ion source region, where the high-energy electrons ionize gas molecules. One embodiment of the magnetic filter uses permanent magnets oriented to establish a magnetic field transverse to the direction of travel of ions from the ion source region to the ion extraction region. In another embodiment, low energy 16 eV electrons are injected into the ion source to dissociate gas molecules and undesired ion species into desired ion species,
- DOE Contract Number:
- W-7405-ENG-48
- Assignee:
- ERA-08-030954; EDB-83-090122
- Patent Number(s):
- None
- Application Number:
- ON: DE83010471
- OSTI ID:
- 6368705
- Country of Publication:
- United States
- Language:
- English
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