Dual surface interferometer
Patent
·
OSTI ID:864236
- Knoxville, TN
- Oak Ridge, TN
A double-pass interferometer is provided which allows direct measurement of relative displacement between opposed surfaces. A conventional plane mirror interferometer may be modified by replacing the beam-measuring path cube-corner reflector with an additional quarter-wave plate. The beam path is altered to extend to an opposed plane mirrored surface and the reflected beam is placed in interference with a retained reference beam split from dual-beam source and retroreflected by a reference cube-corner reflector mounted stationary with the interferometer housing. This permits direct measurement of opposed mirror surfaces by laser interferometry while doubling the resolution as with a conventional double-pass plane mirror laser interferometer system.
- Research Organization:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Number(s):
- US 4334778
- OSTI ID:
- 864236
- Country of Publication:
- United States
- Language:
- English
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/356/
additional
allows
altered
beam
beam path
beam source
beam-measuring
conventional
cube-corner
direct
direct measure
direct measurement
displacement
double-pass
doubling
dual
dual-beam
extend
housing
interference
interferometer
interferometry
laser
laser interferometer
measurement
mirror
mirror surface
mirror surfaces
mirrored
mirrored surface
modified
mounted
opposed
opposed surface
opposed surfaces
path
permits
permits direct
placed
plane
plane mirror
plate
provided
quarter-wave
reference
reference beam
reflected
reflected beam
reflector
relative
replacing
resolution
retained
retroreflected
source
split
stationary
surface
surfaces
wave plate
additional
allows
altered
beam
beam path
beam source
beam-measuring
conventional
cube-corner
direct
direct measure
direct measurement
displacement
double-pass
doubling
dual
dual-beam
extend
housing
interference
interferometer
interferometry
laser
laser interferometer
measurement
mirror
mirror surface
mirror surfaces
mirrored
mirrored surface
modified
mounted
opposed
opposed surface
opposed surfaces
path
permits
permits direct
placed
plane
plane mirror
plate
provided
quarter-wave
reference
reference beam
reflected
reflected beam
reflector
relative
replacing
resolution
retained
retroreflected
source
split
stationary
surface
surfaces
wave plate