Dual surface interferometer
Patent
·
OSTI ID:6442161
A double-pass interferometer is provided which allows direct measurement of relative displacement between opposed surfaces. A conventional plane mirror interferometer may be modified by replacing the beam-measuring path cube-corner reflector with an additional quarter-wave plate. The beam path is altered to extend to an opposed plane mirrored surface and the reflected beam is placed in interference with a retained reference beam split from dual-beam source and retroreflected by a reference cube-corner reflector mounted stationary with the interferometer housing. This permits direct measurement of opposed mirror surfaces by laser interferometry while doubling the resolution as with a conventional double-pass plane mirror laser interferometer system.
- Assignee:
- Dept. of Energy
- Patent Number(s):
- US 4334778
- OSTI ID:
- 6442161
- Country of Publication:
- United States
- Language:
- English
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