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Gage for micromachining system

Patent ·
OSTI ID:863294
 [1]
  1. Sunnyside, WA
+ Show Author Affiliations
A gage for measuring the contour of the surface of an element of a micromachining tool system and of a work piece machined by the micromachining tool system. The gage comprises a glass plate containing two electrical contacts and supporting a steel ball resting against the contacts. As the element or workpiece is moved against the steel ball, the very slight contact pressure causes an extremely small movement of the steel ball which breaks the electrical circuit between the two contacts. The contour information is supplied to a dedicated computer controlling the micromachining tool so that the computer knows the contour of the element and the work piece to an accuracy of .+-. 25 nm. The micromachining tool system with X- and omega-axes is used to machine spherical, aspherical, and irregular surfaces with a maximum contour error of 100 nanometers (nm) and surface waviness of no more than 0.8 nm RMS.
Research Organization:
Pacific Northwest National Laboratory (PNNL), Richland, WA
Assignee:
United States of America as represented by United States (Washington, DC)
Patent Number(s):
US 4141150
Application Number:
05/861,074
OSTI ID:
863294
Country of Publication:
United States
Language:
English

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