skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Omega-X micromachining system

Abstract

A micromachining tool system with X- and omega-axes is used to machine spherical, aspherical, and irregular surfaces with a maximum contour error of 100 nonometers (nm) and surface waviness of no more than 0.8 nm RMS. The omega axis, named for the angular measurement of the rotation of an eccentric mechanism supporting one end of a tool bar, enables the pulse increments of the tool toward the workpiece to be as little as 0 to 4.4 nm. A dedicated computer coordinates motion in the two axes to produce the workpiece contour. Inertia is reduced by reducing the mass pulsed toward the workpiece to about one-fifth of its former value. The tool system includes calibration instruments to calibrate the micromachining tool system. Backlash is reduced and flexing decreased by using a rotary table and servomotor to pulse the tool in the omega-axis instead of a ball screw mechanism. A thermally-stabilized spindle rotates the workpiece and is driven by a motor not mounted on the micromachining tool base through a torque-smoothing pulley and vibrationless rotary coupling. Abbe offset errors are almost eliminated by tool setting and calibration at spindle center height. Tool contour and workpiece contour are gaged on the machine; thismore » enables the source of machining errors to be determined more readily, because the workpiece is gaged before its shape can be changed by removal from the machine.« less

Inventors:
 [1]
  1. (Sunnyside, WA)
Publication Date:
Research Org.:
BATTELLE MEMORIAL INSTITUTE
OSTI Identifier:
863050
Patent Number(s):
US 4083272
Assignee:
United States of America as represented by United States (Washington, DC) PNNL
DOE Contract Number:  
AC06-76RL01830
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
omega-x; micromachining; tool; x-; omega-axes; machine; spherical; aspherical; irregular; surfaces; maximum; contour; error; 100; nonometers; nm; surface; waviness; rms; omega; axis; named; angular; measurement; rotation; eccentric; mechanism; supporting; bar; enables; pulse; increments; workpiece; dedicated; computer; coordinates; motion; axes; produce; inertia; reduced; reducing; mass; pulsed; one-fifth; former; value; calibration; instruments; calibrate; backlash; flexing; decreased; rotary; table; servomotor; omega-axis; ball; screw; thermally-stabilized; spindle; rotates; driven; motor; mounted; base; torque-smoothing; pulley; vibrationless; coupling; abbe; offset; errors; eliminated; setting; center; height; gaged; source; machining; determined; readily; shape; changed; removal; tool bar; micromachining tool; rotary coupling; screw mechanism; tool setting; vibrationless rotary; irregular surfaces; nm rms; dedicated computer; surface waviness; regular surface; contour error; machining tool; machine spherical; maximum contour; /82/33/451/

Citation Formats

Miller, Donald M. Omega-X micromachining system. United States: N. p., 1978. Web.
Miller, Donald M. Omega-X micromachining system. United States.
Miller, Donald M. Sun . "Omega-X micromachining system". United States. https://www.osti.gov/servlets/purl/863050.
@article{osti_863050,
title = {Omega-X micromachining system},
author = {Miller, Donald M.},
abstractNote = {A micromachining tool system with X- and omega-axes is used to machine spherical, aspherical, and irregular surfaces with a maximum contour error of 100 nonometers (nm) and surface waviness of no more than 0.8 nm RMS. The omega axis, named for the angular measurement of the rotation of an eccentric mechanism supporting one end of a tool bar, enables the pulse increments of the tool toward the workpiece to be as little as 0 to 4.4 nm. A dedicated computer coordinates motion in the two axes to produce the workpiece contour. Inertia is reduced by reducing the mass pulsed toward the workpiece to about one-fifth of its former value. The tool system includes calibration instruments to calibrate the micromachining tool system. Backlash is reduced and flexing decreased by using a rotary table and servomotor to pulse the tool in the omega-axis instead of a ball screw mechanism. A thermally-stabilized spindle rotates the workpiece and is driven by a motor not mounted on the micromachining tool base through a torque-smoothing pulley and vibrationless rotary coupling. Abbe offset errors are almost eliminated by tool setting and calibration at spindle center height. Tool contour and workpiece contour are gaged on the machine; this enables the source of machining errors to be determined more readily, because the workpiece is gaged before its shape can be changed by removal from the machine.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Sun Jan 01 00:00:00 EST 1978},
month = {Sun Jan 01 00:00:00 EST 1978}
}

Patent:

Save / Share: