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Diffracted Moire Fringes as Analysis and Alignment Tools for Multilayer Fabrication in Soft Lithography

Journal Article · · Applied Physics Letters
OSTI ID:842274

No abstract prepared.

Research Organization:
Ames Laboratory (AMES), Ames, IA
Sponsoring Organization:
USDOE; USDOE Office of Science (SC)
DOE Contract Number:
W-7405-ENG-82
OSTI ID:
842274
Report Number(s):
IS-J 7025
Journal Information:
Applied Physics Letters, Journal Name: Applied Physics Letters Vol. 86; ISSN APPLAB; ISSN 0003-6951
Country of Publication:
United States
Language:
English

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