Diffracted Moire Fringes as Analysis and Alignment Tools for Multilayer Fabrication in Soft Lithography
Journal Article
·
· Applied Physics Letters
OSTI ID:842274
No abstract prepared.
- Research Organization:
- Ames Laboratory (AMES), Ames, IA
- Sponsoring Organization:
- USDOE; USDOE Office of Science (SC)
- DOE Contract Number:
- W-7405-ENG-82
- OSTI ID:
- 842274
- Report Number(s):
- IS-J 7025
- Journal Information:
- Applied Physics Letters, Journal Name: Applied Physics Letters Vol. 86; ISSN APPLAB; ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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