Smoothing of diamond-turned substrates for extreme ultraviolet illuminators
Journal Article
·
· Optical Engineering
OSTI ID:842115
No abstract prepared.
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- US Department of Energy (US)
- DOE Contract Number:
- AC03-76SF00098
- OSTI ID:
- 842115
- Report Number(s):
- LBNL-58416; OPEGAR; TRN: US200515%%1011
- Journal Information:
- Optical Engineering, Vol. 43, Issue 12; Other Information: Journal Publication Date: 12/2004; PBD: 22 Jul 2005; ISSN 0091-3286
- Country of Publication:
- United States
- Language:
- English
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