Optimization of su-8 processing parameters for deep x-ray lithography.
Conference
·
OSTI ID:841207
No abstract prepared.
- Research Organization:
- Argonne National Lab., Argonne, IL (US)
- Sponsoring Organization:
- US Department of Energy (US)
- DOE Contract Number:
- W-31109-ENG-38
- OSTI ID:
- 841207
- Report Number(s):
- ANL/XFD/CP-111113
- Country of Publication:
- United States
- Language:
- English
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