Macroparticle reflection from a biased substrate in a vacuum arc deposition System
Journal Article
·
· IEEE Transactions on Plasma Science
OSTI ID:841045
- LBNL Library
No abstract prepared.
- Research Organization:
- Ernest Orlando Lawrence Berkeley National Laboratory, Berkeley, CA (US)
- Sponsoring Organization:
- USDOE Director. Office of Science; Fulbright and Welch Fellowship Programs (US)
- DOE Contract Number:
- AC03-76SF00098
- OSTI ID:
- 841045
- Report Number(s):
- LBNL--42144
- Journal Information:
- IEEE Transactions on Plasma Science, Journal Name: IEEE Transactions on Plasma Science Journal Issue: 3 Vol. 27; ISSN ITPSBD; ISSN 0093-3813
- Country of Publication:
- United States
- Language:
- English
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