Gas-Phase Chemistry of Silicon Nitride PECVD Process at Ambient Pressure
Conference
·
OSTI ID:835522
No abstract prepared.
- Research Organization:
- University of California, Los Angeles, CA (US)
- Sponsoring Organization:
- USDOE Office of Environmental Management (EM) (US)
- OSTI ID:
- 835522
- Country of Publication:
- United States
- Language:
- English
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