Magnetic system for producing uniform coatings using a filtered cathodic arc
Journal Article
·
· Plasma Sources Science & Technology
OSTI ID:834305
No abstract prepared.
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- USDOE. Cooperative Research and Development Agreement BG98-984(01). Office of Science Laboratory Technology Research Program, CVC-Veeco; Emmanuel College Research Fellowship (US)
- DOE Contract Number:
- AC03-76SF00098
- OSTI ID:
- 834305
- Report Number(s):
- LBNL-46928; R&D Project: Z46626; TRN: US200432%%54
- Journal Information:
- Plasma Sources Science & Technology, Vol. 10, Issue 4; Other Information: Journal Publication Date: 11/2001; PBD: 1 Oct 2000
- Country of Publication:
- United States
- Language:
- English
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