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Surface studies of carbon films for pyrolyzed photoresist

Journal Article · · Thin Solid Films
OSTI ID:833687
No abstract prepared.
Research Organization:
Ernest Orlando Lawrence Berkeley National Laboratory, Berkeley, CA (US) (US)
Sponsoring Organization:
USDOE. Office of Energy Research. Office of Basic Energy Sciences. Chemical Sciences Division; Swiss National Science Foundation Grant 4036-044040 (US)
DOE Contract Number:
AC03-76SF00098
OSTI ID:
833687
Report Number(s):
LBNL--46560
Journal Information:
Thin Solid Films, Journal Name: Thin Solid Films Vol. 396; ISSN THSFAP; ISSN 0040-6090
Country of Publication:
United States
Language:
English

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