Surface studies of carbon films for pyrolyzed photoresist
Journal Article
·
· Thin Solid Films
OSTI ID:833687
- LBNL Library
No abstract prepared.
- Research Organization:
- Ernest Orlando Lawrence Berkeley National Laboratory, Berkeley, CA (US) (US)
- Sponsoring Organization:
- USDOE. Office of Energy Research. Office of Basic Energy Sciences. Chemical Sciences Division; Swiss National Science Foundation Grant 4036-044040 (US)
- DOE Contract Number:
- AC03-76SF00098
- OSTI ID:
- 833687
- Report Number(s):
- LBNL--46560
- Journal Information:
- Thin Solid Films, Journal Name: Thin Solid Films Vol. 396; ISSN THSFAP; ISSN 0040-6090
- Country of Publication:
- United States
- Language:
- English
Similar Records
Electrochemical studies of carbon films from pyrolyzed photoresist
Fabrication of interdigitated carbon structures by laser pyrolysis of photoresist
X-RAY ABSORPTION SPECTROSCOPY TO PROBE SURFACE COMPOSITION AND SURFACE DEPROTECTION IN PHOTORESIST FILMS
Journal Article
·
Wed Jul 01 00:00:00 EDT 1998
· Journal of the Electrochemical Society
·
OSTI ID:653381
Fabrication of interdigitated carbon structures by laser pyrolysis of photoresist
Journal Article
·
Sun Jan 27 23:00:00 EST 2002
· Electrochemical and Solid-State Letters
·
OSTI ID:837721
X-RAY ABSORPTION SPECTROSCOPY TO PROBE SURFACE COMPOSITION AND SURFACE DEPROTECTION IN PHOTORESIST FILMS
Journal Article
·
Fri Dec 31 23:00:00 EST 2004
· LANGMUIR
·
OSTI ID:884615