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Electrochemical studies of carbon films from pyrolyzed photoresist

Journal Article · · Journal of the Electrochemical Society
DOI:https://doi.org/10.1149/1.1838636· OSTI ID:653381
; ;  [1]; ;  [2]
  1. Lawrence Berkeley National Lab., CA (United States). Environmental Energy Technologies Div.
  2. Univ. of California, Berkeley, CA (United States)

Carbon film electrodes were prepared by pyrolysis of photoresists on silicon wafers at temperatures ranging from 600 to 1,100 C. The physical properties of the carbon films were characterized by scanning and transmission electron microscopies, thermal gravimetric analysis, and four-point probe electrical resistivity measurements. The electrochemical properties of the carbon films were investigated by cyclic voltammetry to observe the kinetics of the Fe(CN){sub 6}{sup 4{minus}}/Fe(CN){sub 6}{sup 3{minus}} redox couple. The carbon film electrodes prepared at temperatures {ge} 700 C showed electrochemical behavior similar to that of glassy carbon. Better electrocatalytic behavior was obtained with carbon films prepared at the higher pyrolysis temperatures, which is attributed to different film compositions at different pyrolysis temperatures. The electrochemical properties of the carbon film electrodes are very stable, exhibiting reproducible behavior even after storing at room temperature in air for 3 months.

Sponsoring Organization:
USDOE, Washington, DC (United States)
DOE Contract Number:
AC03-76SF00098
OSTI ID:
653381
Journal Information:
Journal of the Electrochemical Society, Journal Name: Journal of the Electrochemical Society Journal Issue: 7 Vol. 145; ISSN JESOAN; ISSN 0013-4651
Country of Publication:
United States
Language:
English

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