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Effects of Viscous Flow on Residual Stresses in Film/Substrate Systems

Journal Article · Tue Jan 01 04:00:00 EST 2002 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.1445282· OSTI ID:829127

Hsueh, C H ^[1]

ORNL

No abstract prepared.

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Research Organization:: ORNL Oak Ridge National Laboratory

Sponsoring Organization:: DOE

DOE Contract Number:: AC05-00OR22725

OSTI ID:: 829127

Report Number(s):: P01-112267

Journal Information:: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 5 Vol. 91; ISSN JAPIAU; ISSN 0021-8979

Country of Publication:: United States

Language:: English

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Related Subjects

36 MATERIALS SCIENCE
FILMS
RESIDUAL STRESSES
SUBSTRATES
VISCOUS FLOW