Sublithographic nanofabrication technology for nanocatalysts and DNA chips
Journal Article
·
· Journal of Vacuum Science and Technology
No abstract prepared.
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- USDOE Director. Office of Science. Office of Basic Energy Sciences; Synchrotron Radiation Center Contract 2000-NJ-850, MARCO Contract 2001-MT-887, Korea Science and Engineering Foundation (US)
- DOE Contract Number:
- AC03-76SF00098
- OSTI ID:
- 827080
- Report Number(s):
- LBNL-52899; TRN: US200425%%150
- Journal Information:
- Journal of Vacuum Science and Technology, Vol. 21, Issue 6; Other Information: Journal Publication Date: Nov./Dec. 2003; PBD: 30 Oct 2003
- Country of Publication:
- United States
- Language:
- English
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