Sub-Angstrom electron microscopy for sub-Angstrom nano-metrology

Conference · Sun Jan 18 04:00:00 EST 2004

OSTI ID:821768

O'Keefe, Michael A ^[1]; Allard, Lawrence F

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1. LBNL Library

The revolution in nanoscale science and technology requires instrumentation for observation and metrology - we must be able to see and measure what we build. Because nano-devices operate on the level of a few molecules, or even a few atoms, accurate atomic-scale imaging is called for. High-resolution aberration-corrected electron microscopes (both TEM and STEM) can provide valuable measurements at the sub-Angstrom level. Over the next decade, extension of TEM and STEM resolutions to half-Angstrom levels by next-generation aberration-corrected electron microscopes will advance the capabilities of these essential tools for atomic-scale structural characterization. Because improvements in resolution allow for separation of atom columns in many more projection directions, these microscopes will provide much improved three-dimensional characterization of the shape and internal structure of nanodevices and catalyst nanoparticles (perhaps even true 3-D imaging), and hence provide essential feedback in the nano-theory/construction/measurement loop.

• Research Organization: Ernest Orlando Lawrence Berkeley National Laboratory, Berkeley, CA (US)
• Sponsoring Organization: USDOE Director. Office of Science. Basic Energy Sciences. DE-AC03-76SF00098; Office of Energy Efficiency and Renewable Energy. Office of FreedomCAR and Vehicle Technology. DE-AC05-00OR22725 (US)
• DOE Contract Number: AC03-76SF00098
• OSTI ID: 821768
• Report Number(s): LBNL--54332
• Country of Publication: United States
• Language: English

Related Subjects

29 ENERGY PLANNING, POLICY, AND ECONOMY
36 MATERIALS SCIENCE
47 OTHER INSTRUMENTATION
ATOMS
CATALYSTS
ELECTRON MICROSCOPES
ELECTRON MICROSCOPY
FEEDBACK
MICROSCOPES
NANOMETROLOGY NANOCHARACTERIZATION NANODEVICE NANOCATALYST FREEDOMCAR
RESOLUTION
SHAPE