HRTEM Imaging of Atoms at Sub-Angstrom Resolution

Journal Article · Wed Apr 06 04:00:00 EDT 2005 · Journal of Electron Microscopy

DOI:https://doi.org/10.1093/jmicro/dfi036· OSTI ID:878527

O'Keefe, Michael A; Allard, Lawrence F; Blom, Douglas A

John Cowley and his group at Arizona State University pioneered the use of transmission electron microscopy (TEM) for high-resolution imaging. Images were achieved three decades ago showing the crystal unit cell content at better than 4 Angstrom resolution. This achievement enabled researchers to pinpoint the positions of heavy atom columns within the unit cell. Lighter atoms appear as resolution is improved to sub-Angstrom levels. Currently, advanced microscopes can image the columns of the light atoms (carbon, oxygen, nitrogen) that are present in many complex structures, and even the lithium atoms present in some battery materials. Sub-Angstrom imaging, initially achieved by focal-series reconstruction of the specimen exit surface wave, will become common place for next-generation electron microscopes with CS-corrected lenses and monochromated electron beams. Resolution can be quantified in terms of peak separation and inter-peak minimum, but the limits imposed on the attainable resolution by the properties of the micro-scope specimen need to be considered. At extreme resolution the ''size'' of atoms can mean that they will not be resolved even when spaced farther apart than the resolution of the microscope.

• Research Organization: Ernest Orlando Lawrence Berkeley NationalLaboratory, Berkeley, CA (US)
• Sponsoring Organization: USDOE Director. Office of Science, Office of Basic EnergySciences, M aterials Science and Engineering Division, AssistantSecretary for Energy Efficiency and Renewable Energy. Office of theDeputy Assistant Secretary for Technology Development. Office of theFreedomCAR and Vehicle Technology Program, Oak Ridge NationalLaboratory
• DOE Contract Number: AC02-05CH11231
• OSTI ID: 878527
• Report Number(s): LBNL--57121
• Journal Information: Journal of Electron Microscopy, Journal Name: Journal of Electron Microscopy Journal Issue: 3 Vol. 54
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ATOMS
CARBON
ELECTRON BEAMS
ELECTRON MICROSCOPES
LENSES
LITHIUM
MICROSCOPES
NITROGEN
OXYGEN
RESOLUTION
Sub-Angstrom atomic-resolution high-resolution electronmicroscopy focal-series reconstruction exit-surface wave softwareaberration correction.
TRANSMISSION ELECTRON MICROSCOPY