Spectroscopic characterization of films obtained in pulsed radio-frequency plasma discharges of fluorocarbon monomers

Conference · Fri Dec 31 04:00:00 EST 1993

OSTI ID:81774

Savage, C R; Timmons, R B ^[1]; Lin, J W ^[2]

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1. Univ. of Texas, Arlington, TX (United States)
2. Polytronix, Inc., Richardson, TX (United States)

The structure of plasma-polymerized films obtained using pulsed radio-frequency (rf) duty cycles is shown to vary significantly with the type of rf duty cycle employed. The controllability and tailoring of surface compositions as functions of the rf duty cycle are illustrated for processes carried out with two fluorocarbon monomers, namely, hexafluoropropylene oxide (C{sub 3}F{sub 6}O) and hexafluoropropene (C{sub 3}F{sub 6}). The variations in surface composition with rf duty cycles are documented via X-ray photoelectron spectroscopy and Fourier transform infrared spectroscopy analyses of the films obtained. Progressive and substantial changes in the molecular composition of the plasma-deposited films as functions of the rf duty cycles employed were achieved with both monomers. The experimental results reveal a relatively high level of compositional control of polymers in the plasma polymerization of these monomers as a function of the rf duty cycle employed. In general, there is a progressive increase in the extent of polymer cross-linking with increasing rf duty cycle as evidenced by spectroscopic characterization of the films obtained in this study. 13 refs., 14 figs.

• OSTI ID: 81774
• Report Number(s): CONF-910402--
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
40 CHEMISTRY
CHEMICAL COMPOSITION
ENERGY BEAM DEPOSITION FILMS
FLUORINATED ALIPHATIC HYDROCARBONS
INFRARED SPECTRA
PHOTOELECTRON SPECTROSCOPY
POLYMERS
RF SYSTEMS
SURFACE PROPERTIES