Self-Limiting Behavior of Scanning Electron Beam Induced Local Oxidation of Hydrogen Passivated Silicon Surfaces
Journal Article
·
· Applied Physics Letters
OSTI ID:815008
- ORNL
No abstract prepared.
- Research Organization:
- ORNL Oak Ridge National Laboratory
- Sponsoring Organization:
- DOE
- DOE Contract Number:
- AC05-00OR22725
- OSTI ID:
- 815008
- Report Number(s):
- P99-104945
- Journal Information:
- Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 2 Vol. 76; ISSN APPLAB; ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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