Skip to main content
U.S. Department of Energy
Office of Scientific and Technical Information

Application of the LIGA Process for Fabrication of Gas Avalanche Devices

Journal Article · · IEEE Transactions on Nuclear Science
DOI:https://doi.org/10.1109/23.856719· OSTI ID:800586

No abstract prepared.

Research Organization:
Ernest Orlando Lawrence Berkeley National Lab., Advanced Light Source, Berkeley, CA (US)
Sponsoring Organization:
US Department of Energy (US)
DOE Contract Number:
AC03-76SF00098
OSTI ID:
800586
Report Number(s):
LBNL/ALS--43752; LBNL/ALS--43858
Journal Information:
IEEE Transactions on Nuclear Science, Journal Name: IEEE Transactions on Nuclear Science Journal Issue: 3 Pt 2 Vol. 47; ISSN 0018-9499; ISSN IETNAE
Country of Publication:
United States
Language:
English

Similar Records

Application of the LIGA process for fabrication of gas avalanche devices
Conference · Fri Oct 01 00:00:00 EDT 1999 · OSTI ID:797174

Modeling electrodeposition for LIGA microdevice fabrication
Journal Article · Sat Jan 31 23:00:00 EST 1998 · Microsystem Technologies · OSTI ID:800244

Fabrication of miniaturized deflectors using LIGA
Conference · Sun Oct 01 00:00:00 EDT 1995 · OSTI ID:797173