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Modeling electrodeposition for LIGA microdevice fabrication

Journal Article · Sat Jan 31 23:00:00 EST 1998 · Microsystem Technologies

DOI:https://doi.org/10.1007/s005420050105· OSTI ID:800244

Griffiths, S K ^[1]; Nilson, R H; Ting, A; Bradshaw, R W; Bonivert, W D; Hruby, Jill M

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Research Organization:: Ernest Orlando Lawrence Berkeley National Lab., Advanced Light Source, Berkeley, CA (US)

Sponsoring Organization:: US Department of Energy (US)

DOE Contract Number:: AC03-76SF00098

OSTI ID:: 800244

Report Number(s):: LBNL/ALS--1708

Journal Information:: Microsystem Technologies, Journal Name: Microsystem Technologies Journal Issue: 2 Vol. 4

Country of Publication:: United States

Language:: English

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Related Subjects

43 PARTICLE ACCELERATORS
ADVANCED LIGHT SOURCE
ADVANCED LIGHT SOURCE ALS
ELECTRODEPOSITION
FABRICATION