In-situ x-ray photoemission spectromicroscopy of electromigration in patterned Al-Cu lines with MAXIMUM
Journal Article
·
· Materials Research Society Symposium Proceedings
- LBNL Library
No abstract prepared.
- Research Organization:
- Ernest Orlando Lawrence Berkeley National Lab., Advanced Light Source, Berkeley, CA (US)
- Sponsoring Organization:
- US Department of Energy (US)
- DOE Contract Number:
- AC03-76SF00098
- OSTI ID:
- 800257
- Report Number(s):
- LBNL/ALS--1748
- Journal Information:
- Materials Research Society Symposium Proceedings, Journal Name: Materials Research Society Symposium Proceedings Vol. 516
- Country of Publication:
- United States
- Language:
- English
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