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At-wavelength characterization of the extreme ultraviolet engineering test stand set-2 optic

Journal Article · · Journal of Vacuum Science and Technology B: Microelect. & Nanometer Structures
DOI:https://doi.org/10.1116/1.1421545· OSTI ID:800209
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  1. LBNL Library
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No abstract prepared.

Research Organization:
Ernest Orlando Lawrence Berkeley National Lab., Advanced Light Source, Berkeley, CA (US)
Sponsoring Organization:
US Department of Energy (US)
DOE Contract Number:
AC03-76SF00098
OSTI ID:
800209
Report Number(s):
LBNL/ALS--13724; LBNL/ALS--43736
Journal Information:
Journal of Vacuum Science and Technology B: Microelect. & Nanometer Structures, Journal Name: Journal of Vacuum Science and Technology B: Microelect. & Nanometer Structures Journal Issue: 6 Vol. 19
Country of Publication:
United States
Language:
English

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