Submicron X-Ray Diffraction and its Applications to Problems in Materials and Environmental Science

Technical Report · Fri Aug 16 04:00:00 EDT 2002

DOI:https://doi.org/10.2172/800014· OSTI ID:800014

Patel, J R ^[1]

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1. SLAC

The availability of high brilliance 3rd generation synchrotron sources together with progress in achromatic focusing optics allow to add submicron spatial resolution to the conventional century-old X-ray diffraction technique. The new capabilities include the possibility to map in-situ, grain orientations, crystalline phase distribution and full strain/stress tensors at a very local level, by combining white and monochromatic X-ray microbeam diffraction. This is particularly relevant for high technology industry where the understanding of material properties at a microstructural level becomes increasingly important. After describing the latest advances in the submicron X-ray diffraction techniques at the ALS, we will give some examples of its application in material science for the measurement of strain/stress in metallic thin films and interconnects. Its use in the field of environmental science will also be discussed.

• Research Organization: Stanford Linear Accelerator Center, Menlo Park, CA (US)
• Sponsoring Organization: USDOE Office of Energy Research (ER) (US)
• DOE Contract Number: AC03-76SF00515
• OSTI ID: 800014
• Report Number(s): SLAC-PUB-9374
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
AVAILABILITY
DIFFRACTION
DISTRIBUTION
FOCUSING
GRAIN ORIENTATION
OPTICS
SPATIAL RESOLUTION
SYNCHROTRONS
THIN FILMS
X-RAY DIFFRACTION