Synchrotron X-ray Diffraction and Transmission Electron Microscopy Studies of Interfacial Reaction Paths and Kinetics During Annealing of Fully-002-textured Al/TiN Bilayers
No abstract prepared.
- Research Organization:
- Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source
- Sponsoring Organization:
- USDOE Office of Energy Research (ER) (US)
- DOE Contract Number:
- AC02-98CH10886
- OSTI ID:
- 797062
- Journal Information:
- J. Vac. Sci. Technol. A, Vol. 19, Issue 1; Other Information: PBD: 1 Jan 2001
- Country of Publication:
- United States
- Language:
- English
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